Gary S. May



B.E.E.(1985) Georgia Institute of Technology; M.S. (1987) Electrical Engineering and Computer Science from the University of California at Berkeley.

Ph.D. (1991) Electrical Engineering and Computer Science from the University of California at Berkeley.

Executive Assistant to the President, Office of the President; Motorola Foundation Professor School of Electrical and Computer Engineering
 URL: or

While at Berkeley, he was named a National Science Foundation and an AT&T Bell Laboratories Fellow. His thesis research at Berkeley focused on developing a methodology for the automated malfunction diagnosis of semiconductor fabrication equipment. He has held engineering positions at AT&T Bell Laboratories and at McDonnell-Douglas Corp. He was a National Science Foundation "National Young Investigator," Editor-in-Chief of IEEE Transactions on Semiconductor Manufacturing, and is currently Chair of the National Advisory Board of the National Society of Black Engineers.

Professor May's research interests include semiconductor process and equipment diagnosis, process control, process simulation, yield analysis and enhancement, and equipment/process modeling. Other areas of interest include semiconductor device physics, statistics, artificial intelligence, and expert systems.

Dr. May also coordinates a summer undergraduate research program for minority students called SURE (formerly known as GT-SUPREEM). This program, sponsored by the National Science Foundation, is intended to expose them to engineering research in the hopes that they will one day seek admission into the graduate program at Georgia Tech.


Area of Specialization:
"My field of research is the computer-integrated manufacturing of integrated circuits (IC-CIM), focusing on increasing the efficiency of the microelectronics fabrication process."

Book: Fundamentals of Semiconductor Fabrication by Gary S. May and S.M. Sze, John Wiley & Sons, 2003. ISBN 0-471-23279-3


Computer Scientists of the African Diaspora

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State University of New York at Buffalo

visitors since opening 5/25/97

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